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1

A compact system for simultaneous measurement of linear and angular displacements of nano-stages

Kim, Jae-Wan, Kang, Chu-Shik, Kim, Jong-Ahn, Eom, Taebong, Cho, Mijung, Kong, Hong Jin

Journal:

Year:

2007

Language:

english

File:

PDF, 294 KB

english, 2007

2

A simple method for the compensation of the nonlinearity in the heterodyne interferometer

Eom, TaeBong, Choi, TaeYoung, Lee, KeonHee, Choi, HyunSeung, Lee, SunKyu

Journal:

Measurement Science and Technology

Year:

2002

Language:

english

File:

PDF, 104 KB

english, 2002

3

The dynamic compensation of nonlinearity in a homodyne laser interferometer

Eom, TaeBong, Kim, JongYun, Jeong, Kyuwon

Journal:

Measurement Science and Technology

Year:

2001

Language:

english

File:

PDF, 116 KB

english, 2001

4

Frequency stabilization of an internal mirror He–Ne laser by digital control

Eom, TaeBong, Choi, HyunSeung, Lee, SunKyu

Journal:

Review of Scientific Instruments

Year:

2002

Language:

english

File:

PDF, 419 KB

english, 2002

5

Final report on APMP regional key comparison APMP.L-K6: Calibration of ball plate and hole plate

Takatsuji, Toshiyuki, Eom, Taebong, Tonmueanwai, Anusorn, Yin, Ruimin, van der Walt, Floris, Gao, Sitian, Thu, Bui Quoc, Singhal, R P, Howick, Eleanor, Doytchinov, Kostadin, Valente de Oliveira, José

Journal:

Year:

2014

Language:

english

File:

PDF, 674 KB

english, 2014

6

Final report on APMP Regional Comparison APMP.L-K5: Calibration of step gauge

Eom, Taebong, Sitian, Gao, Wong, S Y, Chaudhary, K P, Praba Drijarkara, A, Howick, Eleanor, Tonmeanwai, Anusom, Pan, Shan-Peng, Takatsuji, Toshiyuki, Cox, Peter, Thalmann, Rudolf, Pires Alves, João An

Journal:

Year:

2012

Language:

english

File:

PDF, 68 KB

english, 2012

7

A precision length measuring system for a variety of linear artefacts

Eom, TaeBong, Han, JinWan

Journal:

Measurement Science and Technology

Year:

2001

Language:

english

File:

PDF, 154 KB

english, 2001

8

SPIE Proceedings [SPIE Micro - DL Tentative - San Jose, CA (Sunday 1 March 1992)] Integrated Circuit Metrology, Inspection, and Process Control VI - Scanning electron microscope system for linewidth measurement of IC

Eom, Cheon I., Eom, TaeBong, Ko, Yeong-Uk, Chung, Myung-Sai, Postek, Jr., Michael T.

Year:

1992

Language:

english

File:

PDF, 400 KB

english, 1992

9

SPIE Proceedings [SPIE SPIE's 27th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 3 March 2002)] Metrology, Inspection, and Process Control for Microlithography XVI - Atomic force microscopy with carbon nanotube tip for critical dimension measurement

Park, Byong Chon, Jung, Ki Y., Song, Won Young, O, Beomhoan, Eom, TaeBong, Herr, Daniel J. C.

Year:

2002

Language:

english

File:

PDF, 568 KB

english, 2002

10

SPIE Proceedings [SPIE SPIE's 1996 International Symposium on Microlithography - Santa Clara, CA (Sunday 10 March 1996)] Metrology, Inspection, and Process Control for Microlithography X - Linewidth measurement of wafers using SEM and its uncertainty evaluation

Ko, Yeong-Uk, Eom, TaeBong, Kim, Ki-Hong, Kim, Seung-Woo, Jones, Susan K.

Year:

1996

Language:

english

File:

PDF, 348 KB

english, 1996

11

SPIE Proceedings [SPIE Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life - Novosibirsk, Russia (Monday 9 September 2002)] Seventh International Symposium on Laser Metrology Applied to Science,Industry, and Everyday Life - Nonlinearity-free heterodyne laser interferometer

Eom, TaeBong, Kim, Jae Wan, Chung, Myung-Sai, Chugui, Yuri V., Bagayev, Sergei N., Weckenmann, Albert, Osanna, P. Herbert

Year:

2002

Language:

english

File:

PDF, 168 KB

english, 2002

12

SPIE Proceedings [SPIE Microlithography 2003 - Santa Clara, CA (Sunday 23 February 2003)] Metrology, Inspection, and Process Control for Microlithography XVII - Atomic force microscopy of steep side-walled feature with carbon nanotube tip

Park, Byong Chon, Herr, Daniel J., Kang, Jae-Hyun, Jung, Ki Y., Song, Won Young, O, Beomhoan, Eom, TaeBong

Year:

2003

Language:

english

File:

PDF, 525 KB

english, 2003

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